Planet Builder

"Kun Furukawa? What's the matter?" Everyone looked at him suspiciously.

Furukawa Taichi said: "Just now, the Chinese Academy of Sciences announced that they have broken through the extreme ultraviolet photoresist production technology and will start mass manufacturing and production of high-end photoresists!"

"What?" The representatives of several major groups stood up abruptly, "This is not something to be joking!"

"I'm not kidding!" said Furukawa Taichi, "Several photoresist companies in China announced that they have obtained technology authorization, immediately build factories and start production!"

When everyone saw him in an anxious tone, it was not like telling lies, so they immediately inquired about the information.

Soon, they saw the news.

"Is the confirmation news true?" A representative of the Tokyo Yinghua Group called and asked the president of the group's Shenzhou region.

"It's true, we have sent someone to contact, and they also specially displayed samples and related data!" the other party replied.

"How can it be so fast?" In the venue, the representatives of these cherry blossom photoresist companies looked at each other. They have only been out of stock for a month, right?

In one month, their technological advantages and product monopoly were gone?

Even Dagui Aoki was dumbfounded. If that were the case, wouldn't they lift a rock and hit him in the foot?

They have just withdrawn from the China market, and China has its own high-end photoresist. Isn't this giving up market share in vain? Is there such a stupid thing in the world?

"Baga!" the representative of JSR scolded, "This is a market of tens of billions of dollars a year, because of a stupid agreement, did you hand it over?"

Daiki Aoki didn't dare to talk casually, and the energy of these multinational groups was not small. He could only say with a guilty conscience: "Maybe they have broken through this technology long ago, and they have only announced it now."

"No!" Furukawa Taichi said angrily, "This is completely caused by your stupid agreement!"

"I got the news that because of this incident, China has mobilized experts from across the country and united tens of thousands of companies to develop together, so the progress is so fast! Under normal circumstances, they will never be able to break through the extreme ultraviolet photoresist technology so quickly. !"

Hearing Furukawa Taichi's words, other representatives glared at Aoki Taiki. They spent decades competing with Deng Country’s enterprises and finally established their position as the leading international photoresist. They did not expect to be overtaken within a month!

All of this is caused by the "comprehensive cooperation" agreement!

"Aoki-kun, we need an explanation!" said the representative of JSR.

"Our loss was caused by the manager of Sakura Country! He must come up with a solution!" said the representative of Tokyo Ohka.

"Our group will issue a letter of protest!" Fujifilm representatives said in a cold voice. The protest they said was not about letting employees take to the streets to protest, but a game at a higher level.

These big capitals are inextricably linked with the management of Sakura Island. A cold sweat is coming from behind Daiki Aoki. He knows that his faction has offended a big capital group!

At that time, someone will definitely have to take the blame to calm their anger, and he is very likely to become the back of the pot!

"Why, it's only a month!" Qing Mu Daigui shouted in his heart, this technological breakthrough will be a few months later, China will definitely give in, but why is it so fast?

…

The breakthrough of extreme ultraviolet photoresist represents that the most critical material problems of photolithography machine and chip manufacturing have been solved.

At the same time, Lu Jianye's team has polished the "lens" required by the extreme ultraviolet lithography machine. In the past, this thing was also one of the products that could not be bought with money. Only Hans Zeiss could manufacture it. Now, Shenzhou can manufacture it by itself.

Other high-end components are also being manufactured simultaneously.

In terms of chip design, it is rather simple. China could have designed high-precision chips, but they couldn't make them. He Xingzhou made a slight improvement and completed the design of a 3nm process chip.

Now, from the manufacturing of extreme ultraviolet lithography machines and the production of 3nm process chips, there is only one last question left-extreme ultraviolet light knife!

He Xingzhou came to the Institute of Optoelectronics and researched with the team of Academician Yan Rui.

In the laser research room, Yan Rui is talking about the problems they encountered: "We are now using gas jets to bombard the target material with a laser to generate plasma. The plasma emits EUV radiation. The EUV radiation passes through a periodic multilayer film mirror. The composed focusing system is incident on the reflective mask. The emitted EUV light waves pass through the projection system composed of mirrors to image the geometric pattern of the integrated circuit on the reflective mask into the photoresist on the silicon wafer to form an integrated circuit The required lithography pattern."

"Theoretically, there is no problem with this process." He Xingzhou nodded.

"But the problem is how to increase the wattage of the EUV light source while reducing the particles, high-speed particles and other pollutants in the plasma atmosphere." Yan Rui said with a headache, "otherwise the light source will deteriorate rapidly. Also, the extreme ultraviolet projection lithography system A reflective mask is used."

"Our EUV mask defects are still as high as ldefect/cm2, and the manufacturing level of the inspection machine must be further improved."

"The problem of the inspection machine, I think Professor Lu's team should be able to solve it." He Xingzhou said, "As for the problem of the extreme ultraviolet light source, I thought of a solution."

"What plan?" The academicians and experts all looked at him.

He Xingzhou said: "The increase in the wattage of the light source can use electric energy!"

"After the high-power laser heats the load body to form plasma and reflects it multiple times, an extreme ultraviolet light source is formed. At this time, a discharge reaction chamber is designed to further transform the plasma and radiate higher brightness and purer extreme ultraviolet light. , If there are also multilayer mirrors, EVU’s nanometer scale will be further improved, and it may be possible to meet the requirements of the 3-nanometer process!"

In fact, this is the solution, but He Xingzhou said it euphemistically.

"We have also imagined doing this!" Yan Rui seemed to have some thoughts. She asked: "This electric energy reaction chamber..."

"I have a design drawing!" He Xingzhou said.

"Really?!" When everyone heard him say this, their spirits were lifted, and they quickly said: "Let's see!"

"Go to the meeting room!" He Xingzhou smiled.

Everyone went to the meeting room together, He Xingzhou called Lumi, asked her to open the design drawings and explain.

When he finished speaking, the audience was silent. Everyone is thinking and calculating.

After a full ten minutes, Yan Rui stood up for the first time and said with joy: "Yes! My preliminary calculations indicate that this solution is entirely possible to achieve the high-brightness extreme ultraviolet light source we require!"

"Yes, my opinion is the same!" An old academician stood up and said excitedly: "This discharge reaction chamber is really magical! After the light source is refracted and lost, the electrical energy will transform the plasma to form a new high-energy plasma, not only without light pollution , It has also further improved the purity of extreme ultraviolet rays. The light knife produced in this way, I am afraid that it can reach the highest level in the world!"

"Chief He, you are such a genius, you can think of such a plan!"

"Then what are you waiting for, let's try it quickly!" The experts couldn't help it.

"This is the beginning!" He Xingzhou smiled. He knew that this attempt would be a success! This is the design that I completed after more than a month of thinking and calculation after unlocking the lithography machine technology by myself!

…

Deng Nation, the "Avengers Alliance" is holding a meeting.

This is not the Avengers alliance in anime and movies, but the EUV Lithography Technology Alliance led by White Eagle.

It is composed of industry giants such as Intel, AMD, Motorola and IBM, plus Sandia National Laboratory and Lawrence Livermore National Laboratory affiliated to the White Eagle!

In addition to the White Eagle, the Western Alliance also has a similar one. It consists of more than 30 countries and hundreds of companies, all of which are related industries of lithography machines and chips.

It is because of their support that Asmak, a company in the country of Windmill, can produce the world's top extreme ultraviolet lithography machine!

Right now, because of the "comprehensive cooperation" agreement, the EUV Alliance of the White Eagles and the EUV Alliance of the Western Alliance have begun to cooperate to discuss the "details of cooperation."

The president of the league, Foster, sits as the chief. He was appointed by the leader of the White Eagle not long ago, and his style is much tougher than the previous one!

The participating members are all representatives from international giants! It can be said that these companies represent the world's top lithography machine and chip technology!

"Sakura submitted a proposal to us, saying that the extreme ultraviolet photoresist technology has been conquered by China, and hopes to open up the extreme ultraviolet photoresist market!" Foster said slowly, "Do you have any comments?"

"Can't open up!" The first representative to speak objected. He was a representative from the Dow Group, Morton, who is also the world's top five photoresist company.

He righteously said: "Since we have reached a cooperation agreement, we must advance and retreat together. Today we will open a photoresist, and tomorrow someone will say to open the lithography machine transmission lens, and the day after tomorrow, someone will say to open the lithography machine bearing. , If this continues, isn't our cooperation agreement a dead letter?"

"Mr. Morton was right." Some members immediately supported his view and said: "The lithography machine and chip manufacturing technology must be firmly controlled in our hands, and a hole cannot be opened!"

"Furthermore, whether China's extreme ultraviolet photoresist is a laboratory product or an energy product is still inconclusive. In case this is a scam they arranged, we will be fooled!"

Morton's opinion was unanimously supported, and Foster nodded and said: "In this case, we will maintain our existing measures."

In fact, for the EUV alliance, they are not a battle line with Sakura. When this alliance was established, it was aimed at Sakura's semiconductor industry.

So they don’t care about the life and death of Sakura's related industries!

"As for the trend of China's semiconductor industry, everyone should also know it." Foster entered the next motion.

"They also set up an organization to jointly develop lithography machines and want to catch up with us!"

When it comes to this, Hymer, the representative of Asim Lithography, said with disdain: "They will not be able to surpass us within ten years!"

"I can say that even if we give them the design drawings of the extreme ultraviolet lithography machine, the Orientals can't make it!"

"This is the world's top industrial technology, and they are far from it!"

After Haimer finished speaking, the representatives present all laughed, with a haughty look on their faces, and many people thought the same as him.

Someone also reminded: "We can't relax our vigilance. In the past year, they have broken through many technologies!"

Mentioning this, Foster's face cooled down and emphasized: "Everyone, why are their technological breakthroughs so fast?"

"We suspect that some members may not abide by the regulations and have leaked technical information!"

"So starting today, all high-end equipment and technology transfers between members must be submitted to the alliance for review, and private transactions are prohibited!"

There was an audit before, but this time it is to increase efforts to ensure that there will be no technical leaks.

Regarding this point, all members agreed that only a technology monopoly can make them a steady stream of money!

Another Qualcomm representative asked: "We are not selling high-end chips in the East now, which is very harmful to our company. When will we be able to develop and sell them?"

"Yes, our computer chip market has also been severely affected!" The representatives of companies such as Intel, IBM and AMD couldn't sit still.

Foster motioned for everyone to be quiet, and said, "That's why we are meeting here today."

"Before the meeting, I have communicated with Asim Corporation, and they are designing a new generation of extreme ultraviolet lithography machine for the 3nm process."

"We need to work together to help them come up with mature 3 nanometer process technology lithography machines and more advanced lithography machines as soon as possible. If our chip technology is upgraded by one level, we will be able to open up first-level chips."

"Moreover, the East is under great pressure recently. They will make concessions soon, and everyone will gain more than they have lost now!"

The people communicated with each other and expressed their opinions. In the end, a preliminary agreement was reached. So many companies and institutions once again joined forces to help Asmar break through more advanced lithography technology.

Asim’s representative Haimer was even more excited and said at the meeting: "Within two years, with your help, within one year, we will guarantee the delivery of a mature, new generation of extreme ultraviolet light with 3nm process technology. Engraving machine!"

"Good!" Foster was very happy, UU reading www. uukanshu.com like this, he can also deal with the above.

And as soon as he took office, he made such a big achievement, and he has a bright future!

He wished Haimer: "I hope you can accomplish your goals as soon as possible. The EUV Alliance is your strongest backing!"

He thought to himself that at that time, those Orientals would definitely feel desperate!

…

At the end of the EVU Alliance meeting, Shenzhou, Northwest Optoelectronics Technology Research Institute.

He Xingzhou, Yan Rui and others are testing their extreme ultraviolet light source.

The discharge reaction chamber he designed before has been manufactured, linked with a laser transmitter, and there are various reflective lenses in the middle to form an extreme ultraviolet light knife generator.

"The first test, launch the laser!" In the laboratory, Yan Rui looked at the instrument carefully and gave the experiment order.